Novel Trench Isolation Technology for Suspended MEMS Structures
نویسندگان
چکیده
منابع مشابه
V ersatile trench isolation technology for the fabrication of microactuators
A trench isolation technology employs trenches refilled with dielectric material to create, in a single layer, electrical isolation between mechanically joined components. This paper explores further use of this technology for MEMS fabrication, particularly the fabrication of electrostatic microactuators. Adding extra features to a two-mask trench isolation process new design opportunities, lik...
متن کاملHigh-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology
Shuffle motors are electrostatic stepper micromotors that employ a built-in mechanical leverage to produce large output forces as well as high resolution displacements. These motors can generally move only over predefined paths that served as driving electrodes. Here, we present the design, modeling and experimental characterization of a novel shuffle motor that moves over an unpatterned, elect...
متن کاملReconfigurable Antenna Structures Using Mems Technology
The tunable characteristics of RF MEMS (Microelectromechanical Systems) components enable their integration with antennas providing numerous advantages such as reconfigurability in polarization, frequency, and radiation pattern [1]. Furthermore, the monolithic fabrication of these components with antennas can reduce parasitic effects, losses and costs. This paper presents two tunable frequency ...
متن کاملSimulation and Derivation of Deflection Equation for Suspended Diaphragm for MEMS Application Using Kirchhoff-Love Theory
In this paper, using theory of sheets, the deflection of suspended diaphragm has been obtained under uniform and circular loading. This type of diaphragm, unlike other diaphragms, has a central support which is recommended to be used in MEMS applications. The relationship between diaphragm deflection and static analysis of this diaphragm enjoys a great significance in investigating and understa...
متن کاملFabrication and characterization of suspended beam structures for SiO2 photonic MEMS
This paper proposes a microfabrication process for the reliable release of SiO2 beam structures. These structures are intended to be utilized in SiO2 photonic MEMS. A major fabrication challenge is the release of thick (>10 μm) SiO2 structures with high yield. A single mask process is developed based on temporary reinforcement of the SiO2 structure. A supporting layer of Si functions as a reinf...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: International Journal of Automation and Smart Technology
سال: 2017
ISSN: 2223-9766
DOI: 10.5875/ausmt.v7i1.1316